Items where Author is "Shaffer, E. O."

Journal Article

Shekhawat, G. S. and Kolosov, O. V. and Briggs, G. A.D. and Shaffer, E. O. and Martin, S. and Geer, R. E. (2000) Nanoscale elastic imaging of aluminum/low-k dielectric interconnect structures. Materials Research Society Symposium-Proceedings, 612. D171-D177. ISSN 0272-9172

Contribution in Book/Report/Proceedings

Shekhawat, G. S. and Kolosov, Oleg and Briggs, G. Andrew D. and Shaffer, E. O. and Martin, S. J. and Geer, R. E. (2000) Nanoscale elastic imaging: a new metrology tool for low-k dielectric integration. In: Interconnect Technology Conference, 2000. Proceedings of the IEEE 2000 International :. IEEE, SAN FRANCISCO, pp. 96-98. ISBN 0-7803-6327-2