Items where Author is "Geer, R. E."

Kolosov, O. and Briggs, G. A. D. and Geer, R. E. and Shekhawat, G. S. (2002) Nanometer-scale mechanical imaging of aluminum damascene interconnect structures in a low-dielectric-constant polymer. Journal of Applied Physics, 91 (7). pp. 4549-4555. ISSN 1089-7550

Shekhawat, G. S. and Briggs, G. Andrew D. and Kolosov, Oleg and Geer, R. E. (2001) Nanoscale elastic imaging and mechanical modulus measurements of aluminum/low-k dielectric interconnect structures. In: Characterization and metrology for ULSI Technology 2000, International Conference :. American Institute of Physics, GAITHERSBURG, pp. 449-452. ISBN 156396967X

Shekhawat, G. S. and Kolosov, O. V. and Briggs, G. A.D. and Shaffer, E. O. and Martin, S. and Geer, R. E. (2000) Nanoscale elastic imaging of aluminum/low-k dielectric interconnect structures. Materials Research Society Symposium-Proceedings, 612. D171-D177. ISSN 0272-9172

Shekhawat, G. S. and Kolosov, Oleg and Briggs, G. Andrew D. and Shaffer, E. O. and Martin, S. J. and Geer, R. E. (2000) Nanoscale elastic imaging: a new metrology tool for low-k dielectric integration. In: Interconnect Technology Conference, 2000. Proceedings of the IEEE 2000 International :. IEEE, SAN FRANCISCO, pp. 96-98. ISBN 0-7803-6327-2