UV-LIGA Microfabrication of 0.3 THz Double Corrugated Waveguide

Sabaawi, Ahmed and Doychinov, V. and Mathisen, Storm and David Paul, Steenson and Letizia, Rosa and Paoloni, Claudio (2017) UV-LIGA Microfabrication of 0.3 THz Double Corrugated Waveguide. In: International Vacuum Electronics Conference 2017, 2017-04-242017-04-26, London.

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Abstract

A microfabrication process has been developed by using ultraviolet photolithography (UV-LIGA) with multi-layer SU-8 photoresist to create high aspect ratio Slow Wave Structures (SWS) for millimeter waves and THz vacuum electron devices. The main steps of the process will be described, applied to the fabrication of a double corrugated waveguide at 300 GHz.

Item Type:
Contribution to Conference (Paper)
Journal or Publication Title:
International Vacuum Electronics Conference 2017
ID Code:
86084
Deposited By:
Deposited On:
10 May 2017 14:02
Refereed?:
Yes
Published?:
Published
Last Modified:
23 Sep 2020 00:05