Sabaawi, Ahmed and Doychinov, V. and Mathisen, Storm and David Paul, Steenson and Letizia, Rosa and Paoloni, Claudio (2018) UV-LIGA Microfabrication of 0.3 THz Double Corrugated Waveguide. In: IVEC 2017 - 18th International Vacuum Electronics Conference :. IVEC 2017 - 18th International Vacuum Electronics Conference . IEEE, GBR. ISBN 9781509059157
UV_LIGA_Microfabrication_of_0.3_THz_Double_Corrugated_Waveguide.pdf - Accepted Version
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Abstract
A microfabrication process has been developed by using ultraviolet photolithography (UV-LIGA) with multi-layer SU-8 photoresist to create high aspect ratio Slow Wave Structures (SWS) for millimeter waves and THz vacuum electron devices. The main steps of the process will be described, applied to the fabrication of a double corrugated waveguide at 300 GHz.