Fabrication and characterization of chromium based single-electron transistors with evaporated chromium oxide barrier tunnel junctions

Pashkin, Yuri and Pekola, Jukka P. (1999) Fabrication and characterization of chromium based single-electron transistors with evaporated chromium oxide barrier tunnel junctions. Journal of Vacuum Science and Technology B, 17 (4): 1413. ISSN 1071-1023

Abstract

We fabricated chromium based single-electron transistors comprising small-area Cr/CrOx/CrCr/CrOx/Cr tunnel junctions with an evaporated chromium oxide barrier. The transistors are fabricated using e-beam lithography with a bilayer resist and two-angle shadow evaporation. We describe the fabrication process and discuss the device characteristics.