Use of self-calibration data for multifunctional MEMS sensor prognostics

Khan, Haroon and Tahir, Muhammed Imran and Richardson, Andrew Mark David (2016) Use of self-calibration data for multifunctional MEMS sensor prognostics. IEEE Journal of Micromechanical Systems, 25 (4). pp. 761-769. ISSN 1057-7157

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This paper proposes a solution to monitor the degradation of a multifunctional microelectromechanical systems (MEMS) sensor (MFS) and to recalibrate the sensor output accordingly. The solution is able to predict the remaining useful life based on the recalibration history. The MFS used is a dual pressure-humidity hybrid sensor where model data have been used to demonstrate the applicability and performance of the proposed method for diagnosis, self-correction, and prognosis.

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Journal Article
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IEEE Journal of Micromechanical Systems
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Deposited On:
02 Jun 2016 09:06
Last Modified:
29 Nov 2021 05:02