Direct e-beam lithography of PDMS

Bowen, James and Cheneler, David and Robinson, Alex (2011) Direct e-beam lithography of PDMS. In: MNE 2011, 37th International Conference on Micro and Nano Engineering, 2011-09-192011-09-23.

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Item Type:
Contribution to Conference (Poster)
Journal or Publication Title:
MNE 2011, 37th International Conference on Micro and Nano Engineering
ID Code:
67503
Deposited By:
Deposited On:
08 Nov 2013 10:26
Refereed?:
No
Published?:
Published
Last Modified:
27 Dec 2019 04:32