Bowen, James and Cheneler, David and Robinson, Alex (2011) Direct e-beam lithography of PDMS. In: MNE 2011, 37th International Conference on Micro and Nano Engineering, 2011-09-19 - 2011-09-23.
Full text not available from this repository.Item Type:
Contribution to Conference
(Poster)
Journal or Publication Title:
MNE 2011, 37th International Conference on Micro and Nano Engineering
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ID Code:
67503
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Deposited On:
08 Nov 2013 10:26
Refereed?:
No
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Published
Last Modified:
19 Sep 2025 22:04
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