Balderrama, Victor S. and Leon-Gil, Jesus A. and Fernandez-Benavides, David A. and Ponce-Hernandez, Juan and Bandala-Sanchez, Manuel (2022) MEMS Piezoresistive Pressure Sensor Based on Flexible PET Thin-Film for Applications in Gaseous-Environments. IEEE Sensors Journal, 22 (3). pp. 1939-1947. ISSN 1530-437X
Full text not available from this repository.Abstract
This experimental study presents the operation of pressure sensors made from lowerature flexible substrates. Design, simulation, fabrication, and characterization are carried out with a number of fabricated flexible pressure devices. Simulations are used to optimize the sensor parameters such as the geometrical shape, electrical potential output, sensitivity and working-range of the sensor, thus predicting the sensing behavior before fabrication. The behaviour of the devices are simulated by using COMSOL Multiphysics. The pressure structure consists of a substrate of polyethylene terephthalate (PET) thin-film used as a diaphragm. A thin layer of indium tin oxide (ITO) on the PET substrate is obtained and used as a first conductive metallic track. Subsequently, nichrome (NiCr 80/20 wt%) alloy material was deposited by electron beaming to generate four piezoresistors with thickness of 50 nm that can be used to detect resistance change using a Wheatstone bridge when the sensor is exposed to different working pressures. Aluminum metallic tracks of 200 nm in thickness are deposited by sputtering in order to connect the four piezoresistors. A working range of pressure is applied from 0 kPa to 130 kPa. Resistivity and sensitivity measured values were 1.37 × 10-3\, Ω-cm and 6.365 mV/kPa respectively. All simulations and experimental results showed that the sensor characteristics are favorable for applications where the pressure is below 130 kPa.