MEMS Piezoresistive Pressure Sensor Based on Flexible PET Thin-Film for Applications in Gaseous-Environments

Balderrama, Victor S. and Leon-Gil, Jesus A. and Fernandez-Benavides, David A. and Ponce-Hernandez, Juan and Bandala-Sanchez, Manuel (2022) MEMS Piezoresistive Pressure Sensor Based on Flexible PET Thin-Film for Applications in Gaseous-Environments. IEEE Sensors Journal, 22 (3). pp. 1939-1947. ISSN 1530-437X

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Abstract

This experimental study presents the operation of pressure sensors made from lowerature flexible substrates. Design, simulation, fabrication, and characterization are carried out with a number of fabricated flexible pressure devices. Simulations are used to optimize the sensor parameters such as the geometrical shape, electrical potential output, sensitivity and working-range of the sensor, thus predicting the sensing behavior before fabrication. The behaviour of the devices are simulated by using COMSOL Multiphysics. The pressure structure consists of a substrate of polyethylene terephthalate (PET) thin-film used as a diaphragm. A thin layer of indium tin oxide (ITO) on the PET substrate is obtained and used as a first conductive metallic track. Subsequently, nichrome (NiCr 80/20 wt%) alloy material was deposited by electron beaming to generate four piezoresistors with thickness of 50 nm that can be used to detect resistance change using a Wheatstone bridge when the sensor is exposed to different working pressures. Aluminum metallic tracks of 200 nm in thickness are deposited by sputtering in order to connect the four piezoresistors. A working range of pressure is applied from 0 kPa to 130 kPa. Resistivity and sensitivity measured values were 1.37 × 10-3\, Ω-cm and 6.365 mV/kPa respectively. All simulations and experimental results showed that the sensor characteristics are favorable for applications where the pressure is below 130 kPa.

Item Type:
Journal Article
Journal or Publication Title:
IEEE Sensors Journal
Uncontrolled Keywords:
/dk/atira/pure/subjectarea/asjc/3100/3105
Subjects:
?? flexible diaphragmmodeling of a pressure sensornichrome piezoresistorssensitivitywheatstone bridgeinstrumentationelectrical and electronic engineering ??
ID Code:
206976
Deposited By:
Deposited On:
16 Oct 2023 13:25
Refereed?:
Yes
Published?:
Published
Last Modified:
16 Jul 2024 00:22