Using bias superposition to test a thick film conductance sensor.

Jeffery, Carl and Zhou, Xu and Richardson, Andrew M. D. (2005) Using bias superposition to test a thick film conductance sensor. Journal of Physics: Conference Series, 15. pp. 161-166. ISSN 1742-6596

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Abstract

A novel on-line monitoring technique for a range of MEMS and integrated sensor systems is presented based on the injection of a test stimuli into the bias structure of transducer functions. The technique `Bias Superposition' utilises both signal injection and signal extraction techniques to achieve an indication of structural integrity of the transducer and interface. The technique has been successfully applied to a thick film conductance sensor.

Item Type: Journal Article
Journal or Publication Title: Journal of Physics: Conference Series
Additional Information: Proceedings of the Sensors and their Applications XIII Conference.
Uncontrolled Keywords: /dk/atira/pure/researchoutput/libraryofcongress/ta
Subjects:
Departments: Faculty of Science and Technology > Engineering
ID Code: 20081
Deposited By: ep_ss_importer
Deposited On: 10 Dec 2008 09:51
Refereed?: No
Published?: Published
Last Modified: 22 Jun 2019 02:04
URI: https://eprints.lancs.ac.uk/id/eprint/20081

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