Using bias superposition to test a thick film conductance sensor.

Jeffery, Carl and Zhou, Xu and Richardson, Andrew M. D. (2005) Using bias superposition to test a thick film conductance sensor. Journal of Physics: Conference Series, 15. pp. 161-166. ISSN 1742-6596

Abstract

A novel on-line monitoring technique for a range of MEMS and integrated sensor systems is presented based on the injection of a test stimuli into the bias structure of transducer functions. The technique `Bias Superposition' utilises both signal injection and signal extraction techniques to achieve an indication of structural integrity of the transducer and interface. The technique has been successfully applied to a thick film conductance sensor.