Механический резонанс в кремниевом нанопроводе с высокой добротностью

Presnov, D. E. and Kafanov, Sergey and Dorofeev, A. A. and Bozhev, I. V. and Trifonov, A. S. and Pashkin, Yuri and Krupenin, V. A. (2018) Механический резонанс в кремниевом нанопроводе с высокой добротностью. JETP Letters, 108 (7). pp. 522-528. ISSN 0021-3640

[thumbnail of Si_Nw_Nems_JETP_16_eng_SK]
Text (Si_Nw_Nems_JETP_16_eng_SK)
Si_Nw_Nems_JETP_16_eng_SK.pdf - Accepted Version
Available under License Creative Commons Attribution.

Download (4MB)


Resonance properties of nanomechanical resonators based on doubly clamped silicon nanowires, fabricated from silicon-on-insulator and coated with a thin layer of aluminum, were experimentally investigated. Resonance frequencies of the fundamental mode were measured at a temperature of $20\,\mathrm{mK}$ for nanowires of various sizes using the magnetomotive scheme. The measured values of the resonance frequency agree with the estimates obtained from the Euler-Bernoulli theory. The measured internal quality factor of the $5\,\mathrm{\mu m}$-long resonator, $3.62\times10^4$, exceeds the corresponding values of similar resonators investigated at higher temperatures. The structures presented can be used as mass sensors with an expected sensitivity $\sim 6 \times 10^{-20}\,\mathrm{g}\,\mathrm{Hz}^{-1/2}$.

Item Type:
Journal Article
Journal or Publication Title:
JETP Letters
Additional Information:
The final publication is available at Springer via http://dx.doi.org/10.1134/S0021364018190037
Uncontrolled Keywords:
ID Code:
Deposited By:
Deposited On:
22 Aug 2019 13:15
Last Modified:
21 Sep 2023 02:28