SU-8 micromachined WR-3 band waveguide bandpass filter with low insertion loss

Chen, Q. and Shang, X. and Tian, Yingtao and Xu, J. and Lancaster, M.J. (2013) SU-8 micromachined WR-3 band waveguide bandpass filter with low insertion loss. Electronics Letters, 49 (7). pp. 480-482. ISSN 0013-5194

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Abstract

Presented is a WR-3 band (220–325 GHz) waveguide bandpass filter, which is constructed from three offset waveguide resonators operating at TE101 mode. This directly coupled resonator filter with Chebyshev response is designed to have a centre frequency of 300 GHz, a fractional bandwidth of 3.3% and a passband return loss of 20 dB. This filter is fabricated using thick SU-8 photoresist micromachining technique and has been tested. The measured average passband insertion loss is as low as around 0.4 dB. The measured return loss is better than 15 dB across the whole passband.

Item Type:
Journal Article
Journal or Publication Title:
Electronics Letters
Uncontrolled Keywords:
/dk/atira/pure/subjectarea/asjc/2200/2208
Subjects:
?? ELECTRICAL AND ELECTRONIC ENGINEERING ??
ID Code:
123982
Deposited By:
Deposited On:
12 Mar 2018 12:08
Refereed?:
Yes
Published?:
Published
Last Modified:
19 Sep 2023 01:52