Degl'Innocenti, R. and Reidt, S. and Guarino, A. and Rezzonico, D. and Poberaj, G. and Günter, P. (2006) Micromachining of ridge optical waveguides on top of He+ -implanted Β-BaB2O4 crystals by femtosecond laser ablation. Journal of Applied Physics, 100 (11). ISSN 0021-8979
Full text not available from this repository.Abstract
We report on a technique for the fabrication of ridge optical waveguides on top of Β- BaB2 O4 (BBO) crystals. The BBO crystals were first implanted by He+ ions to form planar optical waveguides. In the second step, the femtosecond laser ablation technique was employed for micromachining of ridge-type optical waveguides. A thorough study of material-specific ablation parameters for BBO has been performed in order to achieve ablated structures with smooth sidewalls. A further process of Ar+ ion smoothing in a plasma chamber was used to reduce the sidewall roughness of the ablated ridges from 75 to 35 nm root mean square. We demonstrated optical waveguiding in these femtosecond-ablated plasma-treated waveguides and measured total propagation losses of less than 10 dBcm at 532 nm, making them suitable for nonlinear- and electro-optical applications.