Stressed silicon nitride nanomechanical resonators at helium temperatures

Defoort, M. and Lulla, K. J. and Blanc, Christophe and Ftouni, Hossein and Bourgeois, Olivier and Collin, Eddy (2013) Stressed silicon nitride nanomechanical resonators at helium temperatures. Journal of Low Temperature Physics, 171 (5-6). pp. 731-736. ISSN 0022-2291

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We have characterized the mechanical resonance properties (both linear and nonlinear) of various doubly-clamped silicon nitride nanomechanical resonators, each with a different intrinsic tensile stress. The measurements were carried out at 4 K and the magnetomotive technique was used to drive and detect the motion of the beams. The resonant frequencies of the beams are in the megahertz range, with quality factors of the order of 104. We also measure the dynamic range of the beams and their nonlinear (Duffing) behaviour.

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Journal Article
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Journal of Low Temperature Physics
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24 Jul 2017 13:00
Last Modified:
22 Nov 2022 04:50