Modal Decomposition in Goalpost Micro/Nano Electro-Mechanical Devices

Collin, Eddy and Defoort, M. and Lulla, K. J. and Guidi, J. and Dufresnes, S. and Godfrin, H. (2014) Modal Decomposition in Goalpost Micro/Nano Electro-Mechanical Devices. Journal of Low Temperature Physics, 175 (1-2). pp. 442-448. ISSN 0022-2291

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Abstract

We have studied the first three symmetric out-of-plane flexural resonance modes of a goalpost silicon micro-mechanical device. Measurements have been performed at 4.2 K in vacuum, demonstrating high Qs and good linear properties. Numerical simulations have been realized to fit the resonance frequencies and produce the mode shapes. These mode shapes are complex, since they involve distortions of two coupled orthogonal bars. Nonetheless, analytic expressions have been developed to reproduce these numerical results, with no free parameters. Owing to their generality they are extremely helpful, in particular to identify the parameters which may limit the performances of the device. The overall agreement is very good, and has been verified on our nano-mechanical version of the device.

Item Type:
Journal Article
Journal or Publication Title:
Journal of Low Temperature Physics
Uncontrolled Keywords:
/dk/atira/pure/subjectarea/asjc/3100/3104
Subjects:
ID Code:
87140
Deposited By:
Deposited On:
24 Jul 2017 13:10
Refereed?:
Yes
Published?:
Published
Last Modified:
01 Jan 2020 10:24