Solution-Processed Neodymium Oxide/ZnO Thin-Film Transistors with Electron Mobility in Excess of 65 cm V−1 s−1

Bin Esro, Mazran and Kolosov, Oleg Victor and Stolojan, Vlad and Jones, Peter John and Milne, W.I. and Adamopoulos, George (2017) Solution-Processed Neodymium Oxide/ZnO Thin-Film Transistors with Electron Mobility in Excess of 65 cm V−1 s−1. Advanced Electronic Materials, 3 (4): 1700025. ISSN 2199-160X

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This work reports on solution processed Nd2O3 thin films that are deposited under ambient conditions at moderate temperatures of about 400 °C and their implementation as gate dielectrics in thin film transistors employing solution processed ZnO semiconducting channels is also demonstrated. The optical, dielectric, electric, structural, surface, and interface properties of Nd2O3 films are investigated using a wide range of characterization techniques that reveal smooth Nd2O3 films of cubic structure, wide bandgap (6 eV), high-k (11), and low leakage currents (<0.5 nA cm−2). Thin film transistors (TFTs) using ZnO channels show excellent characteristics, such as high electron mobility, in excess of 65 cm2 V−1 s−1, high on/off current ratio in the range between 106 and 107, and negligible hysteresis. The devices demonstrate excellent constant bias stress and air stability air, i.e., only a small decrease of the electron mobility and threshold voltage (<12%). In addition, the excellent uniformity and homogeneity that is demonstrated combined with the relatively low deposition temperature (compared with those used with the vast majority of the vacuum based techniques employed) in ambient air on glass substrates indicates the potential for the rapid development of metal oxide-based TFTs employing gate dielectrics also grown from solutions at low manufacturing cost.

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Journal Article
Journal or Publication Title:
Advanced Electronic Materials
Additional Information:
This is the peer reviewed version of the following article: M. Esro, O. Kolosov, V. Stolojan, P. J. Jones, W. I. Milne, G. Adamopoulos, Adv. Electron. Mater. 2017, 1700025 which has been published in final form at This article may be used for non-commercial purposes in accordance With Wiley Terms and Conditions for self-archiving.
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21 Mar 2017 13:18
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13 Jul 2024 01:17