Defining plasma polymerization:new insight into what we should be measuring

Michelmore, Andrew and Charles, Christine and Boswell, Rod W. and Short, Robert D. and Whittle, Jason D. (2013) Defining plasma polymerization:new insight into what we should be measuring. ACS Applied Materials and Interfaces, 5 (12). pp. 5387-5391. ISSN 1944-8244

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External parameters (RF power and precursor flow rate) are typically quoted to define plasma polymerization experiments. Utilizing a parallel-plate electrode reactor with variable geometry, it is shown that these parameters cannot be transferred to reactors with different geometries in order to reproduce plasma polymer films using four precursors. Measurements of ion flux and power coupling efficiency confirm that intrinsic plasma properties vary greatly with reactor geometry at constant applied RF power. It is further demonstrated that controlling intrinsic parameters, in this case the ion flux, offers a more widely applicable method of defining plasma polymerization processes, particularly for saturated and allylic precursors.

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Journal Article
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ACS Applied Materials and Interfaces
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25 Jan 2017 11:32
Last Modified:
22 Nov 2022 03:45