Gamzina, Diana and Himes, Logan and Barchfeld, Robert and Zheng, Yuan and Popovic, Branko and Paoloni, Claudio and Choi, Eunmi and Luhmann Jr., Neville C. (2016) Nano-CNC machining of sub-THz vacuum electron devices. IEEE Transactions on Electron Devices, 63 (10). pp. 4067-4073. ISSN 0018-9383
Gamzina_nano_cnc_for_ted_revised_7_6_2016.pdf - Accepted Version
Available under License Creative Commons Attribution-NonCommercial.
Download (861kB)
Abstract
Nano-computer numerical control (CNC) machining technology is employed for the fabrication of sub-THz (100-1000 GHz) vacuum electron devices. Submicron feature tolerances and placement accuracy have been achieved and surface roughness of a few tens of nanometers has been demonstrated providing high-quality radio frequency (RF) transmission and reflection parameters on the tested circuit structures. Details of the manufacturing approach are reported for the following devices: W-band sheet beam (SB) klystron, two designs of a 220-GHz SB double-staggered grating traveling wave tube (TWT), 263-GHz SB TWT amplifier for an electron paramagnetic resonance spectrometer, 346-GHz SB backward wave oscillator for fusion plasma diagnostics, 346-GHz pencil beam backward wave oscillator, and 270-GHz pencil beam folded waveguide TWT self-driving amplifier. Application of the nano-CNC machining to nanocomposite scandate tungsten cathodes as well as to passive RF components is also discussed.