Nano-CNC machining of sub-THz vacuum electron devices

Gamzina, Diana and Himes, Logan and Barchfeld, Robert and Zheng, Yuan and Popovic, Branko and Paoloni, Claudio and Choi, Eunmi and Luhmann Jr., Neville C. (2016) Nano-CNC machining of sub-THz vacuum electron devices. IEEE Transactions on Electron Devices, 63 (10). pp. 4067-4073. ISSN 0018-9383

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Nano-computer numerical control (CNC) machining technology is employed for the fabrication of sub-THz (100-1000 GHz) vacuum electron devices. Submicron feature tolerances and placement accuracy have been achieved and surface roughness of a few tens of nanometers has been demonstrated providing high-quality radio frequency (RF) transmission and reflection parameters on the tested circuit structures. Details of the manufacturing approach are reported for the following devices: W-band sheet beam (SB) klystron, two designs of a 220-GHz SB double-staggered grating traveling wave tube (TWT), 263-GHz SB TWT amplifier for an electron paramagnetic resonance spectrometer, 346-GHz SB backward wave oscillator for fusion plasma diagnostics, 346-GHz pencil beam backward wave oscillator, and 270-GHz pencil beam folded waveguide TWT self-driving amplifier. Application of the nano-CNC machining to nanocomposite scandate tungsten cathodes as well as to passive RF components is also discussed.

Item Type:
Journal Article
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IEEE Transactions on Electron Devices
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?? electronic, optical and magnetic materialselectrical and electronic engineering ??
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Deposited On:
27 Sep 2016 13:16
Last Modified:
15 Jul 2024 16:14