Nanothermal characterization of amorphous and crystalline phases in chalcogenide thin films with scanning thermal microscopy

Bosse, Jim and Timofeeva, Maria and Tovee, Peter and Robinson, Benjamin and Huey, Bryan and Kolosov, Oleg (2014) Nanothermal characterization of amorphous and crystalline phases in chalcogenide thin films with scanning thermal microscopy. Journal of Applied Physics, 116 (13). ISSN 0021-8979

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Abstract

The thermal properties of amorphous and crystalline phases in chalcogenide phase change materials (PCM) play a key role in device performance for non-volatile random-access memory. Here, we report the nanothermal morphology of amorphous and crystalline phases in laser pulsed GeTe and Ge2Sb2Te5 thin films by scanning thermal microscopy (SThM). By SThM measurements and quantitative finite element analysis simulations of two film thicknesses, the PCM thermal conductivities and thermal boundary conductances between the PCM and SThM probe are independently estimated for the amorphous and crystalline phase of each stoichiometry.

Item Type:
Journal Article
Journal or Publication Title:
Journal of Applied Physics
Additional Information:
Copyright 2014 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Journal of Applied Physics, 116 (13), 2014 and may be found at http://scitation.aip.org/content/aip/journal/jap/116/13/10.1063/1.4895493
Uncontrolled Keywords:
/dk/atira/pure/subjectarea/asjc/3100
Subjects:
ID Code:
71086
Deposited By:
Deposited On:
02 Oct 2014 15:17
Refereed?:
Yes
Published?:
Published
Last Modified:
01 Apr 2020 03:43