Approximation algorithms for the wafer to wafer integration problem

Dokka, Trivikram and Bougeret, Marin and Boudet, Vincent and Giroudeau, Rodolphe and C.R. Spieksma, Frits (2013) Approximation algorithms for the wafer to wafer integration problem. In: Approximation and Online Algorithms. Lecture Notes in Computer Science, 7846 . Springer-Verlag, Berlin, pp. 286-297. ISBN 9783642380150

Abstract

Motivated by the yield optimization problem in semiconductor manufacturing, we model the wafer to wafer integration problem as a special multi-dimensional assignment problem (called WWI-m), and study it from an approximation point of view. We give approximation algorithms achieving an approximation factor of 3/2 and 4/3 for WWI-3, and we show that extensions of these algorithms to the case of arbitrary m do not give constant factor approximations. We argue that a special case of the yield optimization problem can be solved in polynomial time.