Dokka, Trivikram and Bougeret, Marin and Boudet, Vincent and Giroudeau, Rodolphe and C.R. Spieksma, Frits
(2013)
*Approximation algorithms for the wafer to wafer integration problem.*
In:
Approximation and Online Algorithms.
Lecture Notes in Computer Science, 7846
.
Springer-Verlag, Berlin, pp. 286-297.
ISBN 9783642380150

## Abstract

Motivated by the yield optimization problem in semiconductor manufacturing, we model the wafer to wafer integration problem as a special multi-dimensional assignment problem (called WWI-m), and study it from an approximation point of view. We give approximation algorithms achieving an approximation factor of 3/2 and 4/3 for WWI-3, and we show that extensions of these algorithms to the case of arbitrary m do not give constant factor approximations. We argue that a special case of the yield optimization problem can be solved in polynomial time.