Printed circuit board as a MEMS platform for focused ion beam technology

Cheneler, D. and Teng, J. and Adams, M. and Anthony, C. J. and Carter, E. L. and Ward, M. (2011) Printed circuit board as a MEMS platform for focused ion beam technology. Microelectronic Engineering, 88 (1). pp. 121-126. ISSN 0167-9317

Full text not available from this repository.

Abstract

By combining low-cost printed circuit board technology and focused ion beam techniques, a simple method has been developed to produce thermal microsensors in a robust package with straightforward electrical connectivity. Two devices have been developed to demonstrate the principle. The first was fabricated using a single step process comprised of FIB deposited platinum. The second device utilised a multistep process using FIB milled thermally evaporated Au on a PCB platform with through-plated vias. The performance of these devices was tested by measuring their thermo-electrical characteristics.

Item Type: Journal Article
Journal or Publication Title: Microelectronic Engineering
Uncontrolled Keywords: /dk/atira/pure/subjectarea/asjc/3100/3104
Subjects:
Departments: Faculty of Science and Technology > Engineering
ID Code: 67482
Deposited By: ep_importer_pure
Deposited On: 08 Nov 2013 13:26
Refereed?: Yes
Published?: Published
Last Modified: 01 Jan 2020 08:42
URI: https://eprints.lancs.ac.uk/id/eprint/67482

Actions (login required)

View Item View Item