Printed circuit board as a MEMS platform for focused ion beam technology

Cheneler, D. and Teng, J. and Adams, M. and Anthony, C. J. and Carter, E. L. and Ward, M. (2011) Printed circuit board as a MEMS platform for focused ion beam technology. Microelectronic Engineering, 88 (1). pp. 121-126. ISSN 0167-9317

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By combining low-cost printed circuit board technology and focused ion beam techniques, a simple method has been developed to produce thermal microsensors in a robust package with straightforward electrical connectivity. Two devices have been developed to demonstrate the principle. The first was fabricated using a single step process comprised of FIB deposited platinum. The second device utilised a multistep process using FIB milled thermally evaporated Au on a PCB platform with through-plated vias. The performance of these devices was tested by measuring their thermo-electrical characteristics.

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Journal Article
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Microelectronic Engineering
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08 Nov 2013 13:26
Last Modified:
22 Nov 2022 00:25