Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity

Thiruvenkatanathan, P. and Yan, J. and Woodhouse, J. and Aziz, A. and Seshia, A. A. (2010) Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity. Applied Physics Letters, 96 (8). ISSN 0003-6951

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Abstract

We use the phenomena of mode localization and vibration confinement in pairs of weakly coupled, nearly identical microelectromechanical (MEMS) resonators as an ultrasensitive technique of detecting added mass on the resonator. The variations in the eigenstates for induced mass additions are studied and compared with corresponding resonant frequency shifts in pairs of MEMS resonators that are coupled electrostatically. We demonstrate that the relative shifts in the eigenstates can be over three orders of magnitude greater than those in resonant frequency for the same addition of mass. We also investigate the effects of voltage controlled electrical spring tuning on the parametric sensitivity of such sensors and demonstrate sensitivities tunable by over 400%.

Item Type:
Journal Article
Journal or Publication Title:
Applied Physics Letters
Uncontrolled Keywords:
/dk/atira/pure/subjectarea/asjc/3100/3101
Subjects:
ID Code:
63547
Deposited By:
Deposited On:
19 Apr 2013 10:36
Refereed?:
Yes
Published?:
Published
Last Modified:
28 Oct 2020 10:18