High-frequency metallic nanomechanical resonators

Li, T. F. and Pashkin, Yuri and Astafiev, O. and Nakamura, Y. and Tsai, J. S. and Im, H. (2008) High-frequency metallic nanomechanical resonators. Applied Physics Letters, 92 (4). -. ISSN 0003-6951

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We developed a technology to fabricate fully metallic doubly clamped beams working as nanomechanical resonators. Measured with a magnetomotive detection scheme, the beams, made of polycrystalline metal films, show as good quality as previously reported ones made of single crystal materials, such as Si, GaAs, AlN, and SiC. Our method is compatible with the conventional fabrication process for nanoscale electronic circuits and thus offers a possibility of easily integrating the beams into superconducting charge and flux qubits and single-electron transistors as well as coupling them to coplanar waveguide resonators. (C) 2008 American Institute of Physics.

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Applied Physics Letters
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29 Aug 2012 07:47
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21 Nov 2022 22:48