Method for deposition of crystalline ceramic films

Leah , Rob (2009) Method for deposition of crystalline ceramic films. C23C18/02; C23C18/12.

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Item Type: Patent
Subjects:
Departments: Faculty of Science and Technology > Engineering
ID Code: 56495
Deposited By: ep_importer_pure
Deposited On: 08 Aug 2012 18:06
Refereed?: No
Published?: Published
Last Modified: 21 Dec 2019 01:28
URI: https://eprints.lancs.ac.uk/id/eprint/56495

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