Method for deposition of crystalline ceramic films

Leah , Rob (2009) Method for deposition of crystalline ceramic films. C23C18/02; C23C18/12.

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Item Type:
Patent
Subjects:
ID Code:
56495
Deposited By:
Deposited On:
08 Aug 2012 18:06
Refereed?:
No
Published?:
Published
Last Modified:
20 Jun 2020 06:53