Richardson, Andrew and Vermeiren, W and Straube, B and Olbrich, Thomas (1996) Integrated Test Support for Micro- Electro-Mechanical-Systems (MEMS). In: 5th International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components,, 1996-09-17 - 1996-09-19.
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Journal or Publication Title:
5th International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components,
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ID Code:
50876
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Deposited On:
08 Nov 2011 11:46
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Published
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15 Jul 2024 08:14