Integrated Test Support for Micro- Electro-Mechanical-Systems (MEMS)

Richardson, Andrew and Vermeiren, W and Straube, B and Olbrich, Thomas (1996) Integrated Test Support for Micro- Electro-Mechanical-Systems (MEMS). In: 5th International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components,, 1996-09-171996-09-19.

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Item Type:
Contribution to Conference (Paper)
Journal or Publication Title:
5th International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components,
ID Code:
50876
Deposited By:
Deposited On:
08 Nov 2011 11:46
Refereed?:
Yes
Published?:
Published
Last Modified:
05 Jul 2020 23:32