Olbrich, T and Richardson, A and Vermeiren, W and Straube, B (1997) Integrating testability into microsystems. Microsystem Technologies, 3 (2). pp. 72-79. ISSN 0946-7076
Full text not available from this repository.Abstract
The integration of sensors and actuators with microelectronics into either compact packages or onto a single silicon die is likely to be of major technological importance over the next decade. These systems are referred to as Microsystems or Micro-Electro-Mechanical-Systems (MEMS). One obstacle to mass-market introduction are difficulties with quality and reliability verification. This paper outlines the difficulties of testing microsystems, shows approaches of test generation and verification transferable from the mixed-signal Integrated-Circuit (IC) domain, and demonstrates an on-line test designed for bridge-type, micromachined accelerometer and pressure sensors [1].
| Item Type: | Journal Article |
|---|---|
| Journal or Publication Title: | Microsystem Technologies |
| Uncontrolled Keywords: | /dk/atira/pure/subjectarea/asjc/3100/3104 |
| Subjects: | |
| Departments: | Faculty of Science and Technology > Engineering |
| ID Code: | 50454 |
| Deposited By: | ep_importer_pure |
| Deposited On: | 25 Oct 2011 10:50 |
| Refereed?: | Yes |
| Published?: | Published |
| Last Modified: | 26 Nov 2019 03:24 |
| URI: | https://eprints.lancs.ac.uk/id/eprint/50454 |
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