Integrating testability into microsystems

Olbrich, T and Richardson, A and Vermeiren, W and Straube, B (1997) Integrating testability into microsystems. Microsystem Technologies, 3 (2). pp. 72-79. ISSN 0946-7076

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The integration of sensors and actuators with microelectronics into either compact packages or onto a single silicon die is likely to be of major technological importance over the next decade. These systems are referred to as Microsystems or Micro-Electro-Mechanical-Systems (MEMS). One obstacle to mass-market introduction are difficulties with quality and reliability verification. This paper outlines the difficulties of testing microsystems, shows approaches of test generation and verification transferable from the mixed-signal Integrated-Circuit (IC) domain, and demonstrates an on-line test designed for bridge-type, micromachined accelerometer and pressure sensors [1].

Item Type:
Journal Article
Journal or Publication Title:
Microsystem Technologies
Uncontrolled Keywords:
?? accelerometerhardware and architectureelectronic, optical and magnetic materialselectrical and electronic engineeringcondensed matter physics ??
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Deposited On:
25 Oct 2011 10:50
Last Modified:
15 Jul 2024 12:24