Multiphysical computation of the structural bending in a bottom-drive VCM

García-Moreno, Salatiel and Bandala-Sánchez, Manuel (2016) Multiphysical computation of the structural bending in a bottom-drive VCM. COMPEL - The International Journal for Computation and Mathematics in Electrical and Electronic Engineering, 35 (5). pp. 1617-1624. ISSN 0332-1649

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Abstract

Purpose - This paper intends to lay a background knowledge towards the feasibility of developing a bottom-drive variable capacitance micromotor (VCM) using a surface micromachining process (SMP). The purpose of this paper is to determine the possibility of neglecting the bending of the rotor plates caused by the electrostatic normal forces when deploying a set of mechanical supports. Design/methodology/approach -A multiphysics simulation approach is considered in order to analyse the coupled electromechanical effects in a steady state and to evaluate if the proposed geometries are useful to reduce the bending of the plates. Findings -A surfaced micromachined bottom-drive VCM requires mechanical reinforcement in order to eliminate the risk of an electrical short circuit caused by the deformation in the rotor plates. The combination of an external supporting ring and anchored structural ribs on top of the rotor poles is sufficient to neglect the deformation in the poles of the rotor. Originality/value -An original analysis with the objective of setting a background in the development of a bottom-drive electrostatic micromotor using a SMP is presented.

Item Type:
Journal Article
Journal or Publication Title:
COMPEL - The International Journal for Computation and Mathematics in Electrical and Electronic Engineering
Uncontrolled Keywords:
/dk/atira/pure/subjectarea/asjc/1700/1706
Subjects:
?? micromotorplate bendingsurface micromachiningvariable capacitancecomputer science applicationscomputational theory and mathematicselectrical and electronic engineeringapplied mathematics ??
ID Code:
206982
Deposited By:
Deposited On:
16 Oct 2023 13:25
Refereed?:
Yes
Published?:
Published
Last Modified:
16 Jul 2024 00:22