Finite element analysis to support component level fault modelling for MEMS.

Reichenbach, R. and Rosing, R. and Richardson, Andrew M. D. and Dorey, A. P. (2001) Finite element analysis to support component level fault modelling for MEMS. In: Proceedings of SPIE design, test, integration and packaging of MEMS symposium. UNSPECIFIED, pp. 147-158.

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Item Type:
Contribution in Book/Report/Proceedings
Uncontrolled Keywords:
/dk/atira/pure/researchoutput/libraryofcongress/ta
Subjects:
?? TA ENGINEERING (GENERAL). CIVIL ENGINEERING (GENERAL) ??
ID Code:
20268
Deposited By:
Deposited On:
22 Dec 2008 14:14
Refereed?:
No
Published?:
Published
Last Modified:
17 Sep 2023 03:39