Reichenbach, R. and Rosing, R. and Richardson, Andrew M. D. and Dorey, A. P. (2001) Finite element analysis to support component level fault modelling for MEMS. In: Proceedings of SPIE design, test, integration and packaging of MEMS symposium. UNSPECIFIED, pp. 147-158.
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20268
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Deposited On:
22 Dec 2008 14:14
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Published
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21 Nov 2022 13:17