Beating limitations of surface-bound SPM to explore nanoscale 3D physical properties of advanced materials and devices

Kolosov, Oleg (2021) Beating limitations of surface-bound SPM to explore nanoscale 3D physical properties of advanced materials and devices. In: EU AFMi User Meeting, 2021-03-102021-03-10, Online.

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Abstract

While SPM enjoys great success in materials science due to outstanding sensitivity to local nanoscale physical properties of materials and devices, with lateral resolution down to atomic scale, these studies are inevitably bound to the immediate sample surface. This lecture presents successes and challenges of several key approaches allowing SPM to explore internal structure of studied samples ranging from the semiconductors to biological materials. These include Ar-ion nano-cross-sectioning SPM (xSPM), real time SPM nanotomography and ultrasound based subsurface SPM imaging.