The Physics of Plasma Ion Chemistry : A Case Study of Plasma Polymerization of Ethyl Acetate

Saboohi, S. and Short, R.D. and Coad, B.R. and Griesser, H.J. and Michelmore, A. (2019) The Physics of Plasma Ion Chemistry : A Case Study of Plasma Polymerization of Ethyl Acetate. Journal of Physical Chemistry Letters, 10 (23). pp. 7306-7310. ISSN 1948-7185

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Deposition chemistry from plasma is highly dependent on both the chemistry of the ions arriving at surfaces and the ion energy. Typically, when measuring the energy distribution of ions arriving at surfaces from plasma, it is assumed that the distributions are the same for all ionic species. Using ethyl acetate as a representative organic precursor molecule, we have measured the ion chemistry and ion energy as a function of pressure and power. We show that at low pressure (<2 Pa) this assumption is valid; however, at elevated pressures ion-molecule collisions close to the deposition surface affect both the energy and chemistry of these ions. Smaller ions are formed close to the surface and have lower energy than larger ionic species which are formed in the bulk of the plasma. The changes in plasma chemistry therefore are closely linked to the physics of the plasma-surface interface.

Item Type:
Journal Article
Journal or Publication Title:
Journal of Physical Chemistry Letters
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This document is the Accepted Manuscript version of a Published Work that appeared in final form in Journal of Physical Chemistry Letters, copyright © American Chemical Society after peer review and technical editing by the publisher. To access the final edited and published work see
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Deposited On:
23 Dec 2019 09:35
Last Modified:
20 May 2024 00:12