Construction of nonlinear dynamic MEMS component models using cosserat theory.

Wang, C. and Richardson, Andrew M. D. and Liu, D. and Rosing, R. and Tucker, R. and De Masi, B. (2003) Construction of nonlinear dynamic MEMS component models using cosserat theory. In: Proceedings of the SPIE design, test, integration and packaging of MEMS symposium. Cannes Mandelieu, France.

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10475
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Deposited On:
15 Jul 2008 14:22
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Published
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01 Jan 2020 05:17