Lancaster EPrints

Micromachining of ridge optical waveguides on top of He+ -implanted Β-BaB2O4 crystals by femtosecond laser ablation

Degl'Innocenti, R. and Reidt, S. and Guarino, A. and Rezzonico, D. and Poberaj, G. and Günter, P. (2006) Micromachining of ridge optical waveguides on top of He+ -implanted Β-BaB2O4 crystals by femtosecond laser ablation. Journal of Applied Physics, 100 (11). ISSN 0021-8979

Full text not available from this repository.

Abstract

We report on a technique for the fabrication of ridge optical waveguides on top of Β- BaB2 O4 (BBO) crystals. The BBO crystals were first implanted by He+ ions to form planar optical waveguides. In the second step, the femtosecond laser ablation technique was employed for micromachining of ridge-type optical waveguides. A thorough study of material-specific ablation parameters for BBO has been performed in order to achieve ablated structures with smooth sidewalls. A further process of Ar+ ion smoothing in a plasma chamber was used to reduce the sidewall roughness of the ablated ridges from 75 to 35 nm root mean square. We demonstrated optical waveguiding in these femtosecond-ablated plasma-treated waveguides and measured total propagation losses of less than 10 dBcm at 532 nm, making them suitable for nonlinear- and electro-optical applications.

Item Type: Journal Article
Journal or Publication Title: Journal of Applied Physics
Subjects:
Departments: Faculty of Science and Technology > Engineering
ID Code: 89368
Deposited By: ep_importer_pure
Deposited On: 20 Dec 2017 14:58
Refereed?: Yes
Published?: Published
Last Modified: 11 Jul 2018 06:09
Identification Number:
URI: http://eprints.lancs.ac.uk/id/eprint/89368

Actions (login required)

View Item