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Generation of component level fault models for MEMS

Rosing, R. and Reichenbach, R. and Richardson, A. (2002) Generation of component level fault models for MEMS. Microelectronics Journal, 33 (10). pp. 861-868. ISSN 0026-2692

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Component level (nodal) simulations have been proposed to both implement closed loop simulation of complete microsystems to support the migration to shorter design cycles and implement fault models of micromechanical components. Within such a simulation environment, library cells in the form of behavioural models are used for the basic components of microelectromechanical (MEM) transducers, such as beams, plates, comb-drives and membranes. This paper presents both methodologies to generate the model parameters required for the implementation of accurate component fault models and simulation results from representative defective structures in a MEMS product.

Item Type: Journal Article
Journal or Publication Title: Microelectronics Journal
Departments: Faculty of Science and Technology > Engineering
ID Code: 61109
Deposited By: ep_importer_pure
Deposited On: 07 Jan 2013 14:40
Refereed?: Yes
Published?: Published
Last Modified: 07 Jan 2019 17:07
Identification Number:

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