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Integrated Test Support for Micro- Electro-Mechanical-Systems (MEMS)

Richardson, Andrew and Vermeiren, W and Straube, B and Olbrich, Thomas (1996) Integrated Test Support for Micro- Electro-Mechanical-Systems (MEMS). In: 5th International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components,, 1996-09-171996-09-19, Postdam.

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Item Type: Conference or Workshop Item (Paper)
Journal or Publication Title: 5th International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components,
Subjects:
Departments: Faculty of Science and Technology > Engineering
ID Code: 50876
Deposited By: ep_importer_pure
Deposited On: 08 Nov 2011 11:46
Refereed?: Yes
Published?: Published
Last Modified: 10 Apr 2014 02:46
Identification Number:
URI: http://eprints.lancs.ac.uk/id/eprint/50876

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