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Bringing Multi-Domain Functions to Intelligent Systems through MEMS Technology Platforms – The INTEGRAMplus Access Service.

Richardson, Andrew and Pickering, Chris and McNie, Mark and Reeves, Chris and Schropfer, Gerold and Knapp, Helmut and Bosshard, Christian (2006) Bringing Multi-Domain Functions to Intelligent Systems through MEMS Technology Platforms – The INTEGRAMplus Access Service. MST News (VDI/VDE Technologiezentrum Informationstechnic) (4). pp. 38-40. ISSN 0948-3128

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    Abstract

    Nanotechnology embraces many disciplines, devices and materials. These range from very deep submicron electronic devices including carbon nanotubes, resonant tunnelling devices, and next generation CMOS, through to functional materials such as bio-chemical monolayers and selfassembling molecules. It is widely recognised that to extract the performance benefits from these technologies, suitable carriers and interfaces must be developed to support delivery of electrical or physical input and output and provide a “quiet” electromagnetic and mechanical environment for the active structures. The FP6 Europractice-like Service Project ‘INTEGRAMplus’ aims to provide industrial and academic access to multi-technology MEMS platforms that target both today’s requirements for products based on Microsystems Technologies and tomorrow’s trends towards the exploitation of nanotechnology for new functionality within electronic systems. The INTEGRAMplus technology base is focused on the integration of polymer and silicon technologies. In general the concept is to use polymers for both packaging of active siliconbased devices and to provide fluidic interfaces and delivery functions to silicon-based bio-chemical sensors. This article presents the foundations of the INTEGRAMplus technologies and vision together with potential applications.

    Item Type: Article
    Journal or Publication Title: MST News (VDI/VDE Technologiezentrum Informationstechnic)
    Uncontrolled Keywords: Microsystems ; MEMS Integration ; Polymer / Silicon convergence ; microfluidics
    Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering
    Departments: Faculty of Science and Technology > Engineering
    ID Code: 20010
    Deposited By: Prof Andrew Richardson
    Deposited On: 24 Nov 2008 11:57
    Refereed?: Yes
    Published?: Published
    Last Modified: 24 Jan 2014 05:14
    Identification Number:
    URI: http://eprints.lancs.ac.uk/id/eprint/20010

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